JPH0580100B2 - - Google Patents

Info

Publication number
JPH0580100B2
JPH0580100B2 JP57071795A JP7179582A JPH0580100B2 JP H0580100 B2 JPH0580100 B2 JP H0580100B2 JP 57071795 A JP57071795 A JP 57071795A JP 7179582 A JP7179582 A JP 7179582A JP H0580100 B2 JPH0580100 B2 JP H0580100B2
Authority
JP
Japan
Prior art keywords
objective lens
probe diameter
sample
focal length
charged particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57071795A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58188041A (ja
Inventor
Teruji Hirai
Fukuo Zenitani
Masao Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP57071795A priority Critical patent/JPS58188041A/ja
Publication of JPS58188041A publication Critical patent/JPS58188041A/ja
Publication of JPH0580100B2 publication Critical patent/JPH0580100B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57071795A 1982-04-27 1982-04-27 荷電粒子線のプロ−ブ径設定方法 Granted JPS58188041A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57071795A JPS58188041A (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−ブ径設定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57071795A JPS58188041A (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−ブ径設定方法

Publications (2)

Publication Number Publication Date
JPS58188041A JPS58188041A (ja) 1983-11-02
JPH0580100B2 true JPH0580100B2 (en]) 1993-11-05

Family

ID=13470850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57071795A Granted JPS58188041A (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−ブ径設定方法

Country Status (1)

Country Link
JP (1) JPS58188041A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2632828B2 (ja) * 1987-02-17 1997-07-23 日本電信電話株式会社 荷電ビームの自動制御装置
JP2636381B2 (ja) * 1988-11-11 1997-07-30 日本電子株式会社 電子線装置
JPH1027563A (ja) * 1996-07-10 1998-01-27 Jeol Ltd 走査電子顕微鏡

Also Published As

Publication number Publication date
JPS58188041A (ja) 1983-11-02

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